Deriving and visualizing the impact of parameter change to down-stream variables
Some parameters in the scanner are expected to have a greater impact on a variable of interest. To understand the interdependencies, a sensitivity analysis is a good tool.
In this project, the student will implement a sensitivity analysis using the Virtual Scanner dependency. The resulting interdependencies will be stored and analyzed.
The student will then develop visualization techniques to interactively understand the interdependencies in a multi-dimensional setting.
The project will be supervised by Nicola Pezzotti at ASML Research and Stef van den Elzen and/or Anna Vilanova at TUe. The student is expected to be at ASML in Building 7 for 3 days a week
Stef van den Elzen
Anna Vilanova