Project: Patterns & Correlations in Scanner Data for Wafer Output Optimization
Description
ASML is one of the largest manufacturers of machines that are used in the process
of creating silicon based micro-chips used in modern electronic devices. These machines
are cutting edge photolithography scanners, used in the process of manufacturing
micro-chips. The performance of these machines depend on various sub-processes
carried out by different individual modules working in unison. This paper addresses
problems faced by scanner machines in terms of throughput issues to improve the
productivity of ASML machines. We investigate a series of research questions covering
different issues in scanner data using state of the art approaches to address the
problems. The final goal is to use machine learning to identify previously unknown
patterns in machine log files that can be linked to throughput issues.
Details
- Student
-
ASArjun Sangitrao
- Supervisor
-
Michael Burch
- Link
- Thesis